Product Description
This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

CUSTOMER REVIEWS (Average Customer Rating: 5.0 based on 4 reviews)

an excellent book!

I lent this book from the library in our institute, and this book is very suitable to us, who do research with Synchrotron Radiation in the region of soft X-ray. Many directions of research for soft X-ray are included in this book.
I can't afford it because it is very expensive for me, although I like it very much!
October 31, 2003

Taken from Contemporary Physics (London)

`... excellently written and produced book ... David Attwood is a respected teacher and renowned researcher in all of the topics covered in this book, and is to be congratulated on its timely publication ... there is no doubt in my mind that it will very quickly become a primary source for beginning graduate students (and high level undergraduates) and experienced researchers alike ... Unusually, I cannot think of any way in which the book could be improved. It is comprehensive and enjoyable to read, the figures are illustrative and clearly drawn and the mathematics is at an appropriate level for the intended readership ... it will serve as [an] important reference source as well as a teacher's and researcher's handbook ... I shall certainly be using this book in my future teaching and recommending it to advanced students.' Alan Michette, Contemporary Physics
October 22, 2003

good book

i found this book to be an excellent educational material on soft x-ray science

p.s. please note that there is a web-site by the author with the actual lectures available for watching absolutely free

[...]
October 04, 2002

A very good textbook

I took the class taught by the author at UC-Berkeley while he was finishing up this text (I also proofread a couple of the chapters as part of the class - you can find my name and the names of my classmates in the acknowledgements).

The text is very clearly written. An undergraduate physics / engineering level of understanding of electromagnetics and quantum mechanics is sufficient background for most the textbook. Most of the calculations are done semi-classically which helps for people not well versed in quantum mechanics. It also serves nicely as a reference text.

Topics covered include:
- Grazing incidence optics
- Normal incidence multi-layer mirrors
- Synchrotron radiation
- Cyclotrons, wigglers and undulators
- Plasma physics with applications to EUV and X-ray sources
- Fresnel zone plates
- Coherence
- EUV and X-ray lithograpy
- ...

The textbook stands alone nicely ... you do not need to constantly look up results in other sources and texts.

The textbook also contains a wealth of reference materials (several appendices of atomic data for X-ray transitions, cross sections, mathematical tables, ...)
May 05, 2000

SIMILAR PRODUCTS

Elements of Modern X-ray Physics
by Jens Als-Nielsen, Des McMorrow

Introduction to Modern Optics
by Grant R. Fowles

An Introduction to Surface Analysis by XPS and AES
by John F. Watts, John Wolstenholme

Introduction to Fourier Optics
by Joseph W. Goodman

X-Ray Diffraction
by B. E. Warren