Buy Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E: (closed)) by M. Gentili, Carlo Giovannella, Stefano Selci available and for sale on Brightsurf
| View Larger Image | Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E: (closed)) by M. Gentili, Carlo Giovannella, Stefano Selci
| | List Price: | $225.00 |  | | Available: | Usually ships in 24 hours |  | |  | | Sales Rank: | 4997867 | | Studio: | Springer |  | | Binding: | Hardcover | | Number Of Pages: | 228 | | Publication Date: | April 30, 1994 | | Publisher: | Springer |
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EDITORIAL REVIEWS | Product Description Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
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