| View Larger Image | Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E: (closed)) | Hardcoverby M. Gentili (Editor), Carlo Giovannella (Editor), Stefano Selci (Editor)
| List Price: | $225.00 | | | Available: | Usually ships in 24 hours |
| | Binding: | Hardcover | | Publisher: | Springer | | Edition: | 1st Edition | | Page Count: | 228 Pages | | Publication Date: | April 30, 1994 | | Sales Rank: | 3,398,312rd |
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EDITORIAL REVIEWS |
Product Description
Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL). |
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