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Nanolithography and patterning techniques in microelectronics (Woodhead Publishing in Materials) | Hardcover

by David G. Bucknall (Editor)

List Price:

$289.95

Available:

Usually ships in 24 hours

Binding:

Hardcover

Publisher:

CRC

Edition:

1st Edition

Page Count:

410 Pages

Publication Date:

October 11, 2005

Sales Rank:

4,018,040th

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EDITORIAL REVIEWS

Product Description
Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, photolithography, inkjet printing, and the use of nanostencils. It also discusses prototyping and the manufacture of particular devices. With a distinguished team of contributors, this is an ideal reference for researchers and professionals using advanced polymers in such areas as microelectronics and biomedical devices.