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Detecting substances with swinging mirrors

May 22, 2003

As we know from the familiar sight of a rainbow, a spectrum always has a specific width between violet and red. As the spectrum fans out, in chemical analysis the light or radiation intensity must be measured at various points. One means to achieve this is by using a turning diffraction grid that works like a prism. The spectrum is then continuously mapped by a stationary detector. The higher the spectral resolution required, the more costly the necessary vibration-sensitive precision mechanics become. Thus, this measuring technique is unsuitable for the anticipated mass market for small, portable devices. Just as unsuitable are devices which operate using the Fourier transformation principle, a process-intensive algorithm that calculates the spectrum from the decay of the signal in time. One cost-effective solution is based on semiconductor line detectors which can record the spectral fingerprint of substances in a similar way to a digital camera. However, the number of sensor elements limits either the spectral resolution or the width of the spectrum.

One way forward are micromirrors, complete with built-in diffraction grids, that can be mass-produced like semiconductor chips. Two simple spectrometer prototypes, equipped with the micromirrors, were recently on display at the Sensor trade show in Nürnberg. The first prototype operates in the infrared wavelength spectrum between three and five micrometers, a key area in chemical analysis. "New microtechnologies will soon allow us to produce very cost-effective devices together with our industry partners," says Dr. Thomas Otto of the Chemnitz-based "Department of Micro Devices and Equipment" at the Fraunhofer Institute for Reliability and Microintegration IZM. "The design will also be very robust, a critical element for mobile devices." The mirror, the size of a small fingernail, vibrates back and forth around 1,000 times per second. As this is the mirror's resonance frequency, it's virtually immune to external forces.

An additional cost-saving measure is related to the drive module as Dr. Heinrich Grüger, division head at the Fraunhofer Institute for Photonic Microsystems IPMS emphasizes: "Our spectrometer, which may be adapted to various areas of wavelengths, uses a patented electrostatic principle to actuate the mirror. Since this 'motor' only requires 20 volts, we're able to utilize a standard CMOS chip which will also record the spectrum data." Researchers at both institutes are currently seeking additional industrial partners to assist in developing these and even more powerful spectrometers.

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