Researchers at Nagoya University and Tokyo Electron Miyagi Ltd. have developed a new semiconductor etching method that significantly reduces processing time and enhances energy efficiency. The process employs plasma etching with hydrogen fluoride at very low temperatures, eliminating the need for fluorocarbon gases.
SourceNagoya University·JournalChemical Engineering Journal·TypeExperimental study·DateJan 6, 2026
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Researchers successfully etched hafnium oxide films at atomic-level precision and smoothness without halogen gases. The new method uses nitrogen and oxygen plasmas to form volatile byproducts, resulting in reduced surface roughness and improved device performance.
SourceNagoya University·JournalSmall Science·TypeExperimental study·DateSep 9, 2025
SiC-based pressure sensors offer promising solutions for extreme environments due to their wide bandgap, high carrier saturation drift rate, and strong chemical stability. The review highlights key technologies, including epitaxial layers, piezoresistive effect, ohmic contacts, etching, and sensor packaging.
SourceHigher Education Press·JournalEngineering·DateApr 23, 2025
UCLA doctoral student Yilin Wong noticed spiral patterns on her Germanium chip sample after leaving it overnight. The patterns were influenced by residual stress in the metal film, with different changes in experiment parameters generating various shapes.
SourceUniversity of California - Los Angeles·JournalPhysical Review Materials·DateMar 13, 2025
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Researchers at Linköping University have developed a new technology that adds xenon to digital memories, allowing for even material coating in small cavities. This breakthrough enables more information storage in the same physical size, with 4 terabytes possible in a memory card once holding only 64 megabytes.
SourceLinköping University·JournalNature Communications·DateJan 30, 2025
Scientists at Linköping University have created sheets of gold only a single atom layer thick, termed goldene. This material has given gold new properties that can make it suitable for applications such as carbon dioxide conversion, hydrogen production, and selective production of value-added chemicals.
SourceLinköping University·JournalNature Synthesis·DateApr 16, 2024
Researchers at Linköping University have developed a method to synthesize hundreds of new 2D materials, expanding the possibilities for energy storage, catalysis, and water purification. The study uses a three-step process, including large-scale computations and chemical exfoliation, to identify and create suitable materials.
Researchers have developed a chemical etching method to widen the pores of metal-organic frameworks (MOFs), which could improve their applications in fuel cells and as catalysts. The new MOF structure enables faster transfer of chemicals, enhancing activity and stability.
SourceNagoya University·JournalJournal of the American Chemical Society·DateFeb 29, 2024
Researchers developed a photoelectrochemical technique to precisely tune the lasing wavelength of microdisk lasers with subnanometric accuracy. The new approach facilitates the fabrication of micro- and nano-laser batches with precise emission wavelengths.
SourceSPIE--International Society for Optics and Photonics·JournalAdvanced Photonics·DateSep 1, 2023
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Researchers developed a chemical scissors-mediated structural editing strategy to regulate the structure and elemental composition of MAX phases/MXenes. This approach enables the creation of novel MAX phase and MXene materials with improved functional applications.
SourceChinese Academy of Sciences Headquarters·JournalScience·TypeExperimental study·DateMar 17, 2023
Researchers developed a chemical scissor to split and stitch nanoscopic layers of two-dimensional materials, opening pathways to sustainable energy technologies. This new process allows for structurally splitting, editing, and reconstituting layered materials with exceptional properties.
SourceDrexel University·JournalScience·TypeExperimental study·DateMar 16, 2023
Researchers at Nagoya University developed a new dry etching method for metal carbides, allowing for the selective removal of TiAlC from other compounds. This technique enables the fabrication of gate-all-around transistors with improved performance and reduced leakage.
SourceNagoya University·JournalScientific Reports·DateFeb 21, 2023
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Researchers at The University of Tokyo have developed a cheap and simple method to bond polymers to galvanized steel, resulting in lightweight and durable materials. The process involves pre-treating the steel with an acid wash and dipping it in hot water, creating nanoscale needle structures that allow for strong mechanical linkages.
SourceInstitute of Industrial Science, The University of Tokyo·JournalJournal of Manufacturing Processes·DateDec 21, 2022
MIT researchers have developed a new approach to assemble nanoscale devices from the bottom up, using precise forces to arrange particles and transfer them to surfaces. This technique enables the formation of high-resolution, nanoscale features integrated with nanoparticles, boosting device performance.
SourceMassachusetts Institute of Technology·JournalScience Advances·DateOct 26, 2022
Researchers created silicon nanopillars using MacEtch, a wet etching technique that generates light particles at the right wavelength to proliferate in optical fibers. This breakthrough enables practical quantum communication via optical fibers.
SourceHelmholtz-Zentrum Dresden-Rossendorf·JournalJournal of Applied Physics·TypeExperimental study·DateSep 20, 2022
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A new study uses a microspectroscopic technique to measure micro- and nano-sized plastics in steam-disinfected silicone-rubber baby bottle nipples. The research found that these fine particles can be released into the environment and ingested by babies, posing health risks.
SourceUniversity of Massachusetts Amherst·JournalNature Nanotechnology·TypeObservational study·DateNov 29, 2021
Researchers at Penn State have developed a chemical-free method for etching nanoscale features on silicon wafers. The technique, called tribochemical reaction, uses a scanning probe microscope to remove single layers of atoms from the surface without damaging underlying layers.
SourcePenn State·JournalNature Communications·DateApr 26, 2018
Harvard researchers have developed a technique to fabricate high-quality lithium niobate devices with ultralow loss and high optical confinement. This breakthrough opens the door to practical integrated photonic circuits for applications in quantum photonics, microwave-to-optical conversion, and more.
SourceHarvard John A. Paulson School of Engineering and Applied Sciences·JournalOptica·DateDec 21, 2017
Researchers at the University of Illinois developed a method to chemically etch patterned arrays in gallium arsenide, used in solar cells and lasers. The new technique, called metal-assisted chemical etching (MacEtch), is faster and less expensive than traditional dry etch methods.
SourceUniversity of Illinois at Urbana-Champaign, News Bureau·JournalNano Letters·DateDec 22, 2011
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