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Inorganic-infiltrated polymer hybrid thin film resists for advanced lithography

Researchers at Stony Brook University propose a new method for preparing resist materials for advanced lithography using existing infrastructure and materials. Inorganic-infiltrated polymer hybrid thin films exhibit improved properties, including high optical absorption, etch resistance, and resolution. This development route is expect...

Redesigned high-NA lithography optical system aims to revolutionize semiconductor chipmaking

A redesigned high-NA EUV lithography optical system has been proposed, which could enable the manufacture of smaller computer chips at lower cost than current methods. The new design eliminates troublesome optical effects, enhances resolution, and should be much cheaper to produce.

SourceOkinawa Institute of Science and Technology (OIST) Graduate University·JournalJournal of Micro/Nanopatterning Materials and Metrology·DateJun 17, 2026

An unexpected breakthrough in flat optics

A team from Harvard and University of Lisbon found that silica, a low-refractive index material, can be used for making metasurfaces despite long-held assumptions. They discovered that by carefully considering the geometry of each nanopillar, silica behaves as a metasurface, enabling efficient design of devices with relaxed feature sizes.

SourceHarvard John A. Paulson School of Engineering and Applied Sciences·JournalNano Letters·TypeExperimental study·DateJan 14, 2026

Development of a simple, revolutionary printing technique for periodic nano/microstructures

Researchers developed a simple, repeatable printing technique to create periodic nano/microstructures on glass substrates with useful functions like water-repellency and structural colors. The technique enables fabricating materials without expensive equipment and complex processes, paving the way for innovative gas sensors.

SourceNational Institute for Materials Science, Japan·JournalAdvanced Science·TypeExperimental study·DateOct 31, 2024

Turning silver to gold: A diacetylene derivative-based metallic luster materials

Scientists create diacetylene derivative-based luster materials with tunable colors and metallic lusters, opening new possibilities for applications in jewelry, printing inks, and cosmetics. The developed material can express a golden luster selectively using light irradiation, minimizing environmental footprint and weight.

SourceChiba University·JournalACS Applied Materials & Interfaces·TypeExperimental study·DateOct 30, 2024

Fast burst of infrared light opens a way for 3D processing inside semiconductor chips

Researchers from LP3 Laboratory developed a light-based technique for local material processing in three-dimensional space of semiconductor chips. They successfully fabricated embedded structures inside Si and GaAs materials, which cannot be 3D processed with conventional ultrafast lasers.

SourceInternational Journal of Extreme Manufacturing·JournalInternational Journal of Extreme Manufacturing·DateNov 7, 2022

Towards higher nanopatterning resolution with molecules that fill nanogaps better

A research group from Tokyo University of Science has discovered molecular features that govern the filling process at nanoscales, enabling finer resolutions in ultraviolet nanoimprint lithography. The findings provide valuable insights for guiding the selection and design of optimized resists for sub-10 nm resolution.

SourceTokyo University of Science·JournalNanomaterials·TypeComputational simulation/modeling·DateAug 8, 2022

Surprisingly strong and deformable silicon

A team of researchers at ETH Zurich has made a groundbreaking discovery that silicon can be stronger and more deformable than previously thought. They found that by using a specific lithography method, silicon pillars could withstand much greater widths without breaking, offering new possibilities for the fabrication of micro-?electro-...

SourceETH Zurich·JournalNature Communications·DateJun 10, 2020

Bubble group dancing

Researchers at Zhejiang University discovered a new type of bubbling mechanism that generates periodic and aperiodic bubbles with unique properties. This phenomenon has significant implications for industries such as heat transfer enhancement, mass transfer, and bubble motion control.

SourceAmerican Institute of Physics·JournalPhysics of Fluids·DateApr 11, 2017

A big leap toward tinier lines

A team of researchers at MIT and University of Chicago has developed a self-assembly technique to produce narrow wires on microchips, breaking through fundamental limits in manufacturing processes. The new method uses block copolymers and could be scaled up for mass manufacturing with standard equipment.

SourceMassachusetts Institute of Technology·JournalNature Nanotechnology·DateMar 27, 2017

Self-stacking nanogrids

MIT researchers have developed a technique for stacking layers of block-copolymer wires, creating mesh structures with potential applications in memory and optical chips. The ability to easily produce these self-assembled structures could revolutionize the manufacturing process.

SourceMassachusetts Institute of Technology·JournalNature Communications·DateJan 22, 2016

Sharpening the focus in quantum photolithography

A new quantum lithography protocol developed by George Miroshnichenko improves the resolution of photolithography technology. The protocol addresses physical limitations caused by light diffraction, allowing for narrower stripes and higher-contrast edges on semiconductors.

SourceSpringer·JournalThe European Physical Journal D·DateDec 17, 2013

Silver nanocubes make super light absorbers

Researchers at Duke University have developed a new method to create large-area absorbers using silver nanocubes, which can control the absorption of electromagnetic waves. This breakthrough could lead to more efficient and cost-effective devices for applications such as sensors and solar cells.

SourceDuke University·JournalNature·DateDec 6, 2012

Two-faced miniatures

Researchers at MIT develop a new method to produce tiny particles with defined size and shape featuring regular patterns in two or three dimensions. The team creates Janus particles, microparticles with two chemically different hemispheres, using stop-flow interference lithography.

SourceWiley·DateNov 15, 2007