Nanoscale spheres typically are used as size standards for calibrating surface inspection instruments. NIST produces a number of Standard Reference Materials (SRMs) used by the semiconductor industry for calibration purposes, including SRM 1963, which consists of 100 nanometer (nm) polystyrene spheres. The new method produces uniformly sized metal nanospheres, which might be used to determine, for example, whether surface inspection systems can differentiate metal contaminants from other defects.
The new method, patented earlier this year and licensed to MSP Corp., makes spheres 50 nm to 300 nm in diameter out of copper, nickel, cobalt and other metals. The method involves generating aerosol droplets of a solution in an inert gas and heating the droplets to form metal particles. The solution contains a metal compound, water, and a solvent such as methanol or ethanol. By contrast, the best of current production technologies use hydrogen gas as the solvent, posing a risk of fire or explosion.
For further information, see http://www.nist.gov/public_affairs/factsheet/semiconwest04.htm .