In the research project from STW and Novem, the Utrecht researchers tried to improve the electronic material properties of the silicon layers. They developed silicon layers which are more stable than the commonly used layers of amorphous silicon. By means of a simple method, hot-wire chemical vapour deposition, they also managed to deposit this layer at a rate ten times higher than conventional techniques. This considerably reduces the production costs of flat-panel displays and solar cells. This could be interesting for manufacturers of displays and solar cells and for the semiconductor industry.
For further information please contact Dr Bernd Stannowski (Debye Institute, Utrecht University), tel. + 31(0) 30 2532964, fax +31 (0)30 2543165, e-mail b.stannowski@phys.uu.nl . Information is also available on the Internet at www1.phys.uu.nl/wwwgf . The doctoral thesis was defended on 27 February 2002. Mr Stannowski’s supervisors were Prof. R.E.I. Schropp and Prof. W.F. van der Weg.