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Redesigned high-NA lithography optical system aims to revolutionize semiconductor chipmaking

A redesigned high-NA EUV lithography optical system has been proposed, which could enable the manufacture of smaller computer chips at lower cost than current methods. The new design eliminates troublesome optical effects, enhances resolution, and should be much cheaper to produce.

SourceOkinawa Institute of Science and Technology (OIST) Graduate University·JournalJournal of Micro/Nanopatterning Materials and Metrology·DateJun 17, 2026

Scientists use single-step laser ablation to fabricate ultra-uniform structures smaller than 50 nanometers

Researchers at Sun Yat-sen University create a new method for fabricating ultra-uniform surface structures with features as small as 46 nanometers. The technique uses a carefully tuned femtosecond laser under water immersion, overcoming the challenge of creating uniform nanostructures smaller than 100 nanometers.

SourceInternational Journal of Extreme Manufacturing·JournalInternational Journal of Extreme Manufacturing·DateOct 16, 2025

Control the world's toughest creatures

Scientists successfully fabricated micron-scale metal patterns on living tardigrades, enabling controlled movement through magnetic fields. This breakthrough opens doors for micro/nanofabrication of living organisms and bio-inorganic hybrid systems.

SourceScience China Press·JournalScience Bulletin·TypeExperimental study·DateApr 21, 2025

Tactile lithophane development makes hard scientific data available to students with blindness

A Baylor University chemistry professors develop a codex using lithophane, converting images from scientific textbooks into tactile formats for students with blindness. The study found that students with blindness can accurately describe, recall and distinguish high-resolution data and imagery at an average accuracy of 88%.

SourceBaylor University·JournalScience Advances·TypeObservational study·DateJan 10, 2024

The little things matter: Chemists develop new sensor for microvolume pH detection

Researchers at Xi'an Jiaotong-Liverpool University have developed a sensitive and robust pH sensor that can detect pH variation in just a few microliters of samples. The new sensor uses novel materials and methods to overcome the current method's limitations, which are not sensitive enough or fragile for commercial-scale use.

SourceXi'an Jiaotong-Liverpool University·JournalMicrochimica Acta·TypeExperimental study·DateNov 3, 2023

Enlightening insects: Morpho butterfly nanostructure inspires technology for bright, balanced lighting

Researchers at Osaka University developed a water-repelling nanostructured light diffuser that surpasses the functionality of other common diffusers. The diffuser uses randomly arranged self-cleaning nanopatterns to produce high transmittance and wide angular spread, making it useful for visual displays and energy-saving windows.

SourceOsaka University·JournalAdvanced Optical Materials·TypeExperimental study·DateOct 12, 2023

Laser-induced monolayer graphene nanoprocessing

Researchers at Tohoku University have developed a technique to micro/nanofabricate silicon nitride thin devices using a femtosecond laser. The method enables precise machining and contaminant removal, opening doors for non-destructive cleaning of high-purity graphene. By applying this method to an ultra-thin atomic layer of graphene, t...

SourceTohoku University·JournalNano Letters·DateMay 26, 2023

Fiber sensing scientists invent 3D printed fiber microprobe for measuring in vivo biomechanical properties of tissue and even single cell

Researchers at Shenzhen University have developed a compact fiber optical nanomechanical probe (FONP) to measure in vivo biomechanical properties of tissue and even single cells. The high-precision mechanical sensing system enables accurate measurements with spring constants as low as 2.1 nanonewtons.

SourceInternational Journal of Extreme Manufacturing·JournalInternational Journal of Extreme Manufacturing·DateFeb 10, 2023

Towards higher nanopatterning resolution with molecules that fill nanogaps better

A research group from Tokyo University of Science has discovered molecular features that govern the filling process at nanoscales, enabling finer resolutions in ultraviolet nanoimprint lithography. The findings provide valuable insights for guiding the selection and design of optimized resists for sub-10 nm resolution.

SourceTokyo University of Science·JournalNanomaterials·TypeComputational simulation/modeling·DateAug 8, 2022

Flexible and recyclable optoelectronics move a step closer

Researchers have demonstrated a new type of flexible, recyclable electrode that could replace traditional transparent conductive oxides in creating low-cost solar cells, computer displays, smartphone touch screens, and smart windows. The electrodes boasted high transmittance, low sheet resistance, and outstanding flexural endurance.

SourceARC Centre of Excellence in Exciton Science·JournalAdvanced Functional Materials·DateJun 10, 2020

Imprinted color patterns

Chinese researchers create an azopolymer that allows light-induced nanoimprinting at room temperature, overcoming heat-dependent issues in traditional photolithography. The technique enables the creation of structurally colored surfaces and has potential applications in nanofabrication and electronics industry.

SourceWiley·JournalAngewandte Chemie International Edition·DateJan 15, 2020

Graphene 'sandwich' key to new electronics

Researchers from Graphene Flagship partner DTU developed a graphene 'sandwich' by encasing graphene with insulating hexagonal boron nitride, allowing them to achieve higher electrical currents and control the material's properties. This breakthrough enables the creation of nano-electronics with small dimensions.

SourceGraphene Flagship·JournalNature Nanotechnology·DateFeb 19, 2019

Princeton engineers develop low-cost recipe for patterning microchips

Researchers at Princeton University have invented a new process called fracture-induced structuring that enables the self-formation of periodic lines, or gratings, separated by as few as 60 nanometers. This technique uses a thin polymer film and is simpler and faster than traditional methods, making it economically feasible for large-s...

SourcePrinceton University, Engineering School·JournalNature Nanotechnology·DateSep 2, 2007

Researchers develop detailed design rules for nanoimprint lithography processing

A three-year study by Georgia Institute of Technology and Sandia National Laboratories provides a roadmap for next-generation micron- and nanometer-scale high-resolution imprint manufacturing. The research develops manufacturing design rules that will give future users a predictive tool kit to know what to expect over a broad range of ...

SourceGeorgia Institute of Technology·JournalJournal of Micromechanics and Microengineering·DateApr 24, 2006